■  Langmuir probe

     •  I-V Characteristic Curve
          * Ion, electron densities, electron temperatures from the I-V curve
          * Diagnostics for only non deposition plasma

                        

■  Floating Harmonic Method

     •  Basic principle
            * Nonlinearity in plasma-sheath characteristics
            * Fast electron temperature measurement in fusion devices
                  - J. A. Boedo, et. al., Rev SciInstru, 1999. 
            * Electron temperature & ion density (ion flux) in processing plasmas (deposition)
                  - MH Lee, et. al, J. Applied Physics, 2007

                         

       •  Maxwellianelectron distribution & floating condition

                            

■  Comparison with Langmuir probes

       •  Electron Temperatures @ RF Powers  (Argon 20mTorr)

                    

          •  Ion Densities @ RF Powers  (Argon 20mTorr)