■  Fluorocarbon plasma (CF4)

    •  Plasma parameters @ CF4/Ar Mixtures

          

■  Uniformity of Plasma in Ar, O2, CF4 gas  

        

■  Measurement with a coating probe

     •  In order to diagnose processing plasmas (etching or deposition), we need to coat an insulating layer on the probe tip
          as a protection layer.
      •  Comparison with a probe with Al₂O₃ coated (~10um) and a metal probe.
           *  Voltage reduction compensation due to the oxide layer impedance.