| |
Wise Probe |
WiPS |
Measurement
Plasma Parameter |
*
Ion Flux / Plasma Density
*
Electron temperature |
*
Ion Flux / Plasma Density
*
Electron temperature |
Measurement
Surface Parameter |
-
|
*
SRP (Surface Related Parameter)
*
BMP (Boundary Monitoring Parameter) |
| Sensor type |
Probe type |
Wall Mount type |
| Probe Deposition |
OK
|
OK |
| Data refresh rate |
~ 0.5 sec |
 0.25 sec
|
Option
|
*
Auto Linear Scanner
* Fast Measurement Mode
~ 0.1 msec
|
|
Recommended
Application |
Plasma
characterization in
research
labs
|
Production
line plasma monitoring
|
