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- ÇöóÁ ÀüÀÚ°øÇÐ ¿¬±¸½Ç Á¹¾÷»ý Graduates (2005 ~ Present)
Name/ Affiliation |
Date |
|
|
Dissertation |
±è °æ Çö (¹Ú»ç)
»ï¼ºÀüÀÚ ¹ÝµµÃ¼ |
2020.8 |
|
megatonp@dreamwiz.com |
Analysis of inductively coupled plasmas through measuring electron energy distribution functions for gas decompositio |
±è ÁÖ È£ (¹Ú»ç)
¹Ú»ç ÈÄ °úÁ¤ |
2020.2 |
|
selectrickjh@gmail.com |
A study on high efficiency plasma generation in inductively coupled plasmas with a resonant antenna coil |
¹® ÁØ Çö (¹Ú»ç)
»ï¼ºÀüÀÚ ¹ÝµµÃ¼ |
2020.2 |
|
cmdoor@hanyang.ac.kr |
Studies on E - H mode transition and its hysteresis with coil current reduction in inductively coupled plasmas |
¹Ú Áö ȯ (¹Ú»ç)
SK ÇÏÀ̴нº |
2019.2 |
|
starc86@gmail.com |
Frequency-domain nonlinear acoustic echo reduction techniques using single-channel and multi-channel microphones |
¹Ú ÀÏ ¼ (¹Ú»ç)
»ï¼ºÀüÀÚ ¹ÝµµÃ¼ |
2019.2 |
|
ilseo876@naver.com |
Analysis of characteristics of inductively coupled plasmas using two-dimensional simultaneous plasma diagnostics |
ÀÌ ³» ÀÏ (¹Ú»ç)
¿¬±¸±³¼ö |
2019.2 |
|
|
|
° Çö ÁÖ (¹Ú»ç)
»ï¼ºÀüÀÚ ¹ÝµµÃ¼ |
2018.2 |
|
khj2605@naver.com |
Studies on the collisionless heating in low pressure inductively coupled plasmas |
±è µ¿ ȯ (¹Ú»ç)
SK ÇÏÀ̴нº |
2017.2 |
|
realdh@hotmail.com |
Studies on high temporal resolution probe diagnostic methods for rapidly changing plasmas |
ÀÌ Àç ¿ø (¹Ú»ç)
»ï¼ºÀüÀÚ ¹ÝµµÃ¼ |
2017.2 |
|
soulj12@gmail.com |
Studies on effect of remote plasma on an in-tandem main inductively coupled discharge |
¿À ½Â ÁÖ (¹Ú»ç)
»ï¼ºÀüÀÚ ¹ÝµµÃ¼ |
2017.2 |
|
kaisj@hanmail.net |
Studies on global model with multistep ionizations in helium plasma |
±è Çö ÁØ (¹Ú»ç)
¹Ú»çÈÄ °úÁ¤ |
2016.8 |
|
kimhj1833@nate.com |
´ë¸éÀû ÇöóÁ °øÁ¤À» À§ÇÑ °ÀÚ¼ºÃ¼¸¦ ÀÌ¿ëÇÑ À¯µµ°áÇÕ ÇöóÁÀÇ ¹æÀü Ư¼º ¿¬±¸ Studies on discharge characteristics of the ferrite inductive coupled plasma for large area plasma processing |
±è Áø ¿ë (¹Ú»ç)
»ï¼ºÀüÀÚ ¹ÝµµÃ¼ |
2016.2 |
|
kimjy011@nate.com |
ÇöóÁ °øÁ¤À» À§ÇÑ ÀÌÂ÷¿ø ÇöóÁ ºÐÆ÷ ¹× è¹ö º®¸é¿¡ ÁõÂøµÈ À¯Àü¸· µÎ²² Áø´Ü¹ý Studies on diagnostics of two dimensional plasma distribution and chamber wall-deposition deielectric film thickness for plasma process |
±è À¯ ½Å (¹Ú»ç)
»ï¼ºÀüÀÚ ¹ÝµµÃ¼ |
2016.2 |
|
lovehan9@hotmail.com |
°íÁ¶ÆÄ ºÐ¼®¹ýÀ» ÀÀ¿ëÇÑ °í¼Ó ÇöóÁ ÃøÁ¤ ¹× À½ÀÌ¿Â ¼±¼Ó ºÐÆ÷ ÃøÁ¤ ¿¬±¸ Studies on fast plasma diagnostics and negative ion flux distribution measurement using harmonic analysis |
±è ¿µ ö (¹Ú»ç)
SK ÇÏÀ̴нº |
2015.8 |
|
saladin072@hanmail.net |
ÇöóÁ °øÁ¤À» À§ÇÑ 2Â÷¿ø ÇöóÁ Áø´Ü ¹× ÇöóÁ Ư¼º ºÐ¼® ¿¬±¸ A study on two-dimensional plasma diagnostics and analysis of discharge characteristics for plasma processing |
±è ¿µ µµ (¹Ú»ç)
»ï¼ºÀüÀÚ »ý»ê±â¼ú¿¬±¸¼Ò |
2014.8 |
|
1984jedi@hanmail.net |
°øÁ¤ °³¼±À» À§ÇÑ À¯µµ°áÇÕÇöóÁ ¹æÀüƯ¼ººÐ¼® ¹× Áø´Ü¹ý¿¡ °üÇÑ ¿¬±¸ A study on plasma diasnostics and characteristics of inductive discharge for plasma processing |
ÀÌ È¿ â (¹Ú»ç)
KRISS Çѱ¹Ç¥ÁØ°úÇבּ¸¿ø |
2012.8 |
|
flower4507@hanyang.ac.kr |
RF ¹ÙÀ̾ À¯µµ°áÇÕ ÇöóÁ ÀåÄ¡¿¡¼ ÇöóÁ º¯¼ö¿Í ÀüÀÚ ¼ö¼Û °¡¿¿¡ °üÇÑ ¿¬±¸ Studies on plasma parameters and electron transport heating in RF biased inductively coupled plasma |
¿À ¼¼ Áø (¹Ú»ç)
»ï¼ºÀüÀÚ »ý»ê±â¼ú¿¬±¸¼Ò |
2012.8 |
|
lifetide@hanyang.ac.kr |
ÇöóÁ Áø´ÜÀ» À§ÇÑ ½¬½º ÀÓÇÇ´ø½º ÃøÁ¤ ¹× Ư¼º ÀÀ¿ë¿¡ °üÇÑ ¿¬±¸ |
ÀÌ ¿µ ±¤ (¹Ú»ç)
»ï¼ºÀüÀÚ »ý»ê±â¼ú¿¬±¸¼Ò |
2012.2 |
|
lifetide@hanyang.ac.kr |
À¯µµ °áÇÕ ¾Æ¸£°ï ÇöóÁÀÇ ±¤¹æÃ⠺б¤¹ý¿¡ °üÇÑ ¿¬±¸ Study on optical emission spectroscopy in inductively coupled argon plasma |
¹æ Áø ¿µ (¹Ú»ç)
»ï¼ºÀüÀÚ ¹ÝµµÃ¼ |
2011.8 |
|
tanziny@paran.com |
´ë¸éÀû ¹ÝµµÃ¼ °øÁ¤À» À§ÇÑ ÇöóÁ ¹ß»ý¿ø¿¡ ´ëÇÑ ¿¬±¸ Studies on plasma source for large-area processing |
ÃÖ ÀÍ Áø (¹Ú»ç)
¼¼¸Þ½º |
2014.8 |
|
gnsman@nate.com |
´Ù¾çÇÑ Á¶°ÇÀÇ ÇöóÁ¿¡¼ ÇöóÁ º¯¼ö¸¦ ÃøÁ¤Çϱâ À§ÇÑ ºÎÀ¯Çü Á¤ÀüŽħ¹ý ¿¬±¸ Studies on floating Langmuir probe methods to measure plasma parameters at various plasma conditions |
Àå ¼º È£ (¹Ú»ç)
»ï¼ºÀüÀÚ »ý»ê±â¼ú¿¬±¸¼Ò |
2010.2 |
|
tosungho@hotmail.com |
ºÎÀ¯ ÀüÀ§¿¡¼ °íÁ¶ÆÄ Àü·ùºÐ¼®À» ÅëÇÑ °øÁ¤ ÇöóÁ Áø´Ü ¹× Á¦¾î ¿¬±¸ Studies on Real-time Plasma Diagnostics and Control by Using Harmonic Current Analysis at Floating Potential |
Name/ Affiliation |
Date |
|
Thesis |
|
¼ Á¾ ÀÎ (¼®»ç)
SK ÇÏÀ̴нº |
2020.2 |
|
jongin904@naver.com |
Modified floating harmonic method by analyzing harmonic currents of a DC blocking capacitor |
±è ¹ü ¼® (¼®»ç)
P S K |
2020.2 |
|
zxzx0372@naver.com |
Measurements of electron energy probability function in 2 MHz and 13.56 MHz dual frequency capacitively coupled argon plasma |
¹Ú ±Ù È« (¼®»ç)
LG µð½ºÇ÷¹ÀÌ |
2019.2 |
|
pak926@Nate.com |
The effect of step ionizations on the high energy electron temperature in inductively coupled plasma |
¹é ¼¼ ¿ (¼®»ç)
»ï ¼º Àü ÀÚ |
2019.2 |
|
back130@naver.com |
Àú¾Ð À¯µµ°áÇÕ ÇöóÁ¿¡¼ÀÇ ¸®¸ðÆ® ÇöóÁ ¼Ò½º Ư¼º The characteristics of remote plasma source in low pressure inductively coupled plamsas |
Àå À± ¹Î (¼®»ç)
LG ÀüÀÚ »ý»ê±â¼ú¿ø |
2016.8 |
|
cynjack@naver.com |
·©¹Â¾îÇÁ·ÎºêÀÇ RFº¸»óÀ» À§ÇÑ ¿ÜÀå¼öµ¿ÇÊÅÍ ¼³°è Tunable external RF choke filter design for single Langmuir probe in RF discharges |
±¸ ½½ ÀÌ (¼®»ç)
SK ÇÏÀ̴нº |
2016.2 |
|
goooseul@naver.com |
Investing on electron bounce resonance heating at carious chamber height in a low pressure inductively coupled plasma |
Ȳ ö ¹Î (¼®»ç)
·¥¸®¼Ä¡ÄÚ¸®¾Æ |
2016.2 |
|
|
ÇöóÁ¸¦ ÀÌ¿ëÇÑ ³ôÀº ¼±Åúñ·Î ÇϺÎÃþ ¼Õ»óÀÌ ¾ø´Â µî¹æ¼º È°¼ºÁ¾ ½Ä°¢¿¡ °üÇÑ ¿¬±¸ Study on damage-free isotropic radical etch with high selectivity using dry plasma High selective etch on Dummy poly removal |
Ȳ Çý ÁÖ (¼®»ç)
ÄÚ¹ÌÄÚ |
2013.8 |
|
gpwn1219@naver.com |
°íÁ¶È Àü·ù ºÐ¼®¹ýÀ» ÀÌ¿ëÇÑ ÇöóÁ ³»ÀÇ ÀüÀÚ ¿¡³ÊÁö ºÐÆ÷ ÃßÁ¤ ¹æ¹ý ¿¬±¸ A study on estimation method of electron energy distribution functions using floating harmonic analysis |
ÇÑ ´ö ¼± (¼®»ç)
ÇÏÀ̴нº ¹ÝµµÃ¼ |
2013.2 |
|
q1q1w2w2@naver.com |
¾ÈÅ׳ª Á¢Áö ´Ü ÃàÀü±â¸¦ »ç¿ëÇÑ À¯µµ°áÇÕ ÇöóÁ Ư¼º ¹× ÀÀ¿ë¿¡ °üÇÑ ¿¬±¸ |
ÀÌ Èñ Áø (¼®»ç)
Çö´ë ÀÚµ¿Â÷ |
2013.2 |
|
jeelhj@naver.com |
¹«¼±Àü·ÂÀü¼ÛÀ» ÀÌ¿ëÇÑ ÇöóÁ ¹Ðµµ ºÐÆ÷ Á¦¾î |
±è Çö ÁØ (¼®»ç)
P S K |
2012.2 |
|
kimhj1833@hanyang.ac.kr |
Àü·Â°ø±Þ¹æ½Ä¿¡ µû¸¥ À¯µµ°áÇÕ ÇöóÁ Ư¼º º¯È ¿¬±¸ |
ÀÌ Á¤ ±Ô (¼®»ç)
À¯ Áø Å× Å© |
2012.2 |
|
chunrangljk@hanmail.net |
À¯µµ °áÇÕ ÇöóÁ¿¡¼ °¡½º Á¾·ù¿¡ µû¸¥ E-H ¸ðµå ÀüÀÌ Çö»ó ¿¬±¸ |
À¯ °æ (¼®»ç)
ÇÏÀ̴нº ¹ÝµµÃ¼ |
2012.2 |
|
sblueskyw@naver.com |
°íÁ¶È Àü·ù ºÐ¼®¹ýÀ» ÀÌ¿ëÇÑ ÇöóÁ ³»ÀÇ ÀüÀÚ ¿¡³ÊÁö ºÐÆ÷ ÃßÁ¤ ¹æ¹ý ¿¬±¸ A study on estimation method of electron energy distribution functions using floating harmonic analysis |
ÀÌ ¼ö Áø (¼®»ç)
¼¼¸Þ½º
|
2012.2 |
|
sjlee0715@hotmail.com |
ºñ´ëĪ Àü±Ø ±¸Á¶¸¦ °®´Â ÃàÀü °áÇÕ ÇöóÁ¿¡¼ÀÇ ¹æÀü Ư¼º°ú Àü·Â ¼Òºñ ¸ðµå ÀüÀÌ¿¡ °üÇÑ ¿¬±¸ Study on the discharge characteristics and power dissipation mode transition in asymmetric capacitively coupled plasma |
ÀÌ ¿µ È£ (¼®»ç)
ÇÏÀ̴нº ¹ÝµµÃ¼ |
2011.2 |
|
withzealot@naver.com |
ÇöóÁ °øÁ¤Àåºñ¿¡¼ÀÇ º¯¾Ð±â¸¦ ÀÌ¿ëÇÑ ÇöóÁ Àü·Âº¯È¯ È¿À² °³¼± ¿¬±¸ A Study on the Efficient Power to the Plasmas Using a Transformer |
ÇÑ Çü ½Ä (¼®»ç)
»ï¼ºÀüÀÚ LCD |
2010.8 |
|
chosator@naver.com |
¶û¹Â¾î Žħ ºÎÀ¯ ÀüÀ§¿¡¼ÀÇ ½¬½º µÎ²² ÃøÁ¤ Measurement of Sheath Thickness at a Floating Pontential |
À± ÀΠâ (¼®»ç)
±èÆ÷°íµîÇб³ ±³»ç |
2010.8 |
|
yic8717@paran.com |
°íÁÖÆÄ RF Àΰ¡ Àü±ØÀÌ ÀúÁÖÆÄ À¯µµ°áÇÕ ÇöóÁ¿¡ ¹ÌÄ¡´Â È¿°ú The effect of high frequency baised electrode on a low freqency inductively coupled plasma |
±¸ ÁÖ È¯(¼®»ç)
LG À̳ëÅØ |
2010.2 |
|
used_up@naver.com |
´Ù¾çÇÑ È¥ÇÕ °¡½º À¯µµ°áÇÕ ÇöóÁ¿¡¼ ÀüÀÚ-ÀÌ¿Â ¼Õ½Ç ´ç ¿¡³ÊÁö ¼Õ½Ç ÃøÁ¤ Measurement of total energy losses per electron-ion lost in various mixed gas inductively coupled plasmas |
±è ¾Æ ¶÷(¼®»ç)
DMS (º´¿ªÆ¯·Ê)
|
2010.2 |
|
rock1023@naver.com |
ºñ ¿ÆòÇü ÀüÀÚ ºÐÆ÷ ÇöóÁ¿¡¼ÀÇ ºÎÀ¯ °íÁ¶È ºÐ¼® ¿¬±¸ A study of the harmonic analysis method in non-Maxwellian plasmas |
±è °Ç È£(¼®»ç)
LGÀüÀÚ ±â¼ú¿¬±¸¼Ò |
2009.8 |
|
kgunho@hanmail.net |
À¯µµ°áÇÕ ÇöóÁ¿¡¼ ½¬½º °æ°è¸é°ú è¹ö Áß½ÉÀÇ ¹Ðµµºñ¿¡ ´ëÇÑ ½ÇÇèÀû ¿¬±¸ Experimental investigation on Edge-to-Center density ratio in inductively coupled plasma |
Ȳ ±¤ ÅÂ(¼®»ç)
»ï¼ºÀüÀÚ ¹ÝµµÃ¼ |
2009.8 |
|
hkt99@nate.com |
Àڱ⠹ÙÀ̾ Çö»óÀ» ÀÌ¿ëÇÑ ÀüÀڿµµ ¹× À̿¹еµ ÃøÁ¤ Measurement of the eletron temperatures and ion densties using self-bias effect in argon inductively coupled plasma |
Ȳ ±â È£(¼®»ç)
»ï¼ºÀü±â
|
2008.2 |
|
gen4@naver.com |
½Ç½Ã°£ °èÃøÀ» ÅëÇÑ °øÁ¤ ÇöóÁ ¼Ò½º Áø´Ü A Study on Process Plasma Source Diagnostics by Real-Time Measuring Technique |
±è Áø ¼º(¼®»ç)
ÇÏÀ̴нº ¹ÝµµÃ¼
|
2008.2 |
|
kjs30513@naver.com |
À¯µµ °áÇÕ ÇöóÁ¿¡¼ µÎ ¾ÈÅ׳ªÀÇ ±¸Á¶¿¡ µû¸¥ Ư¼º ¿¬±¸ A study of plasma characteristics depending on antenna shapes in Inductively Coupled Plasmas(ICPs) |
³² Çü È£(¼®»ç)
´ë¸íÈÇÐ |
2008.2 |
|
namhh78@naver.com |
°íÈ¿À² ¹× ȸÀü´ëĪ¼º Çâ»óÀ» À§ÇÑ À¯µµ°áÇÕ ÇöóÁ ¾ÈÅ׳ª New Inductive coupled plasma antenna for improving the high efficiency and azmuthal symmetries |
ÀÌ °æ È¿(¼®»ç)
ÇÏÀ̴нº ¹ÝµµÃ¼
|
2007.2 |
|
canopus24@paran.com |
´ë¸éÀû °øÁ¤À» À§ÇÑ Ãø¸éÇü Æä¶óÀÌÆ® À¯µµ °áÇÕ ÇöóÁ Ư¼º ¿¬±¸ Characterization of newly developed side-type ferrite inductively coupled plasma for large area processing |
¹Ú ³² ¼®(¼®»ç)
LG ÀüÀÚ |
2005. |
|
pureumae@lge.com |
Double Half Turn ¾ÈÅ׳ª¿¡ ÀÇÇØ ¹ß»ýµÈ ÇöóÁ Ư¼º ¿¬±¸ The plasma Chracteristic Study by a Double Half Turn Antenna |
±è ¿ø ±â(¼®»ç)
ÇÏÀ̴нº ¹ÝµµÃ¼ |
2005. |