Plasma Analytic Solutions

   

 













 

 탐침을 이용한 전기신호 분석방식   Electrical diagnostic Tool  
 실시간 플라즈마 변수 측정   Real time plasma measurement
 공정가스 플라즈마 측정 (CF4, SF6, BF3, Cl2, BCl3…)   Plasma diagnostics in real processing plasmas
 Tip depo 상황에도 측정가능
 측정 변수 : Plasma parameter, Surface related parameter (tip or chamber wall surface)  
 적용 기술 : Floating Harmonic Method

 

 

 General Langmuir Probe principle

     •  I-V Characteristic Curve
          * Ion, electron densities, electron temperatures from the I-V curve
          * Diagnostics for only non deposition plasma

                        

■  Wise Probe : Floating Harmonic Method

                    

     •  Basic principle
            *  Nonlinearity in plasma-sheath characteristics
            *  
Te found using the ratio of ω / 2ω of the probe current by applying  the sinusoidal voltage (ω)
                to the probe though  the blockingcapacitor which holds the DC potential at the floating potential.

                       [Ref]  M. H. Lee, S. H. Jang and C. W. Chung, J. Appl. Phys., 101, 033305 (2007)

                                             

       •  Maxwellianelectron distribution & floating condition

                            

 

■  Comparison with Langmuir probes

       
•  Electron Temperatures @ RF Powers  (Argon 20mTorr)

                    

          
•  Ion Densities @ RF Powers  (Argon 20mTorr)

                        

 

           

  133-791 서울특별시 성동구 행당동 17번지 HIT B107호  피앤에이 솔루션즈   TEL 070-8251-0344

  HIT B107, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul, 133-791, KOREA