Plasma Analytic Solutions

   

 













 

 

Model Ư ¡

Wise Probe

 Probe Tip ġ(1 Point) ö

 Linear Scanner Line [ɼ]

 Chamber Wall Monitoring System [ɼ]

 ö е

 Ion Flux

 ڿµ

Wise Probe  2D

 2 ö

 ö е

 Ion Flux

 ڿµ

Wise Langmuir Probe

 Single Langmuir Probe

  ö

 ڿ

 ڿµ

 ö е

 ö

 

 

 Wise Probe

     •  Probe Unit : è Ͽ ö ȣ  
     •  WP Controller : Reference ȣ߻, ȣ ȯ, ó, м, ǥ
     •  WP Software : ׷ ǥ, , м

                        

 Probe Unit

                    

 

 Auto Linear Scanner (Optional)

                    

 

 Wise Probe ǽð

          

                             

 Comparison with Langmuir probes
       

     

 Wise Probe Measuremnents Example

       •  Ar+CF4 Varying mix ratio @ 20mTorr

           

    •  Ar, O2, CF4 @ 10mTorr by Auto Linear Scanner

         

              

 WiPS (Wise Plasma Monitoring System)

       •   Chamber Wall Mount Monitoring System

           

      •   Chamber Wall Monitoring : SRP (Surface Related Parameter)  è ǥ ͸
 
                              

 

  133-791 Ư 絿 17 HIT B107ȣ  Ǿؿ ַ   TEL 070-8251-0344

  HIT B107, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul, 133-791, KOREA