Plasma Analytic Solutions

   

 













 

 

 Wise Probe Data

       •  Ar+CF4 Varying mix ratio @ 20mTorr

           

      •  Ar, O2, CF4 @ 10mTorr by Auto Linear Scanner

         

     •  Measurement with a coating probe
     
   *  In order to diagnose processing plasmas (etching or deposition), we need to coat an insulating layer
             on the probe tip as a protection layer.
      
   * Comparison with a probe with Al2O3 coated (~10um) and a metal probe.
             (Voltage reduction compensation due to the oxide layer impedance.)


              

 Wise Probe 2D Data

       •  Plasma density @ Ar  with various power  100W 300W

                             

 

      •  Plasma density @ Ar 6 mTorr with various power

            

    •  Ion Flux @ various Pressure SiH4

               

 Wise Langmuir Probe

                           

 

 

 

  133-791 Ư 絿 17 HIT B107ȣ  Ǿؿ ַ   TEL 070-8251-0344

  HIT B107, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul, 133-791, KOREA