- 플라즈마 진단  Advanced Plasma Diagnostics                                                     

 

 

 

- 반도체/디스플레이용 플라즈마 소스  Plasma Sources for Processing                                                              

                                                   

           

                                               (Ferrite-ICP)                                                         (전자기 컴퓨터 모사 )

- 무선 전력 전송  Wireless Power Transfer

 

 

증착(Deposition) → 패턴닝(Lithography) → 식각(Etching) 반복으로 단위 공정 구성

                                                                                       (표시부분은 플라즈마가 적용되는 부분)